CAPACITY MEMS SENSITIVE ELEMENT OF THE STABILIZATION SYSTEM
Abstract
Known stabilization systems (SS) use Coriolis, piezoelectric, gyroscopic, string transducers as sensitive elements [1, 2]. But recently the most promising are capacitive MEMS sensitive elements (SE) [3-6, 8-16]. However, in the known literature there is almost no information about the design, features, principle of operation of capacitive MEMS
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