BEZVESILNA, O. .; KOTLIAR, S. . CAPACITY MEMS SENSITIVE ELEMENT OF THE STABILIZATION SYSTEM. News of Science and Education, [S. l.], n. 8, 2022. Disponível em: https://scieduc.eu/ojs_en/index.php/en_ojs/article/view/33. Acesso em: 20 sep. 2024.